Beilstein J. Nanotechnol.2024,15, 447–456, doi:10.3762/bjnano.15.40
; FEBIP; sidewallangle; Introduction
Focused electron beam-induced processing (FEBIP) is a technique in which a focused electron beam is directed onto a substrate with an adsorbed layer of precursor molecules. The precursor molecules are supplied from a gas injection system through a nozzle at close
PDF
Figure 1:
SE image of a deposited FEBID carbon line, top view (a) and FIB cross section (b). The line was dep...